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- Article name
- Fabricating the optic films from zinc oxide by magnetron sputtering on direct anda lternating current
- Authors
- Volpyan O. D., , o.d.volpian@rambler.ru, Research and Development Institute "Polyus", Moscow, Russia
Obod Yu. A., , o.d.volpian@rambler.ru, M. F. Stelmakh Research Institute "Polyus", 3 Vvedensky str., Moscow, 117342, Russia
Yakovlev P. P., , o.d.volpian@rambler.ru, M. F. Stelmakh Research Institute "Polyus", 3 Vvedensky str., Moscow, 117342, Russia
- Keywords
- magnetron sputtering / optical features / films of zinc oxide
- Year
- 2010 Issue 3 Pages 24 - 30
- Code EDN
- Code DOI
- Abstract
- Consideration is made to influence of oxygen and pressure of plasma-generating gas on element composition and optical features of the zinc oxide films fabricated by magnetron sputtering a zinc target in Ar:O2 medium.
- Text
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