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- Article name
- Stadying of metastable states of Ti-Al-N based films formed by various plasma sourses
- Authors
- KAMENEVA A. L., , kameneva@pstu.ru, Federal State budget institution of higher education "National Research Perm Polytechnic University", Perm, Russia
SHTEINIKOVA V. V., , patent@pm.pstu.ac.ru, The state educational establishment of higher vocational training Perm State Technical University, Perm, Russia
- Keywords
- non-equilibrium metastable condition / films based on Ti-Al-N / fractal substructure / shaft substructure / electroarc evaporator / unbalanced magnetron / plase composition / chemical composition
- Year
- 2009 Issue 4 Pages 64 - 70
- Code EDN
- Code DOI
- Abstract
- The ion-plasma film metastable states accompanying to polycrystalline states have been revealed. Characteristic morphological features of fractal and shaft substructures on the ion-plasma film surface have been studied. Simultaneous influence of the two various plasma sourses, arc evaporater and non-balanced magnetron, on phase and chemical composition of the Ti-Al-N based films have been established.
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