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- Article name
- The technological process of the production of glass-ceramic elements of devices for the making vacuum-tight seams
- Authors
- BATYUNYA L.P., , , The Moscow State Institute of Electronic Devices (The Technical University), Moscow, Russia
- Keywords
- Year
- 2006 Issue 1 Pages 55 - 60
- Code EDN
- Code DOI
- Abstract
- Results of development and investigation of technological process of the making of detals from glass-ceramic materials for production of vacuum-tight seams with metals in integrated-circuit packages were represented.
- Text
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