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- Article name
- Technological aspects of the making of multi-ply structures for magneto-sensitive devices
- Authors
- BATYUNYA L.P., , , The Moscow State Institute of Electronic Devices (The Technical University), Moscow, Russia
- Keywords
- Year
- 2006 Issue 1 Pages 60 - 63
- Code EDN
- Code DOI
- Abstract
- The technological process of the production of multi-ply thin-film structures with reproducible properties of the mixture of bismuth-strontium-calcium-cooper-oxygen and zirconium-titanium-lead on oxidized silicon substrates was considered.
- Text
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