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- Article name
- Evolution of the film structure in the process of electron beam, thermal, anodic andcathodic arc evaporation
- Authors
- KAMENEVA A. L., , annkam789@mail.ru, Federal State Budget Institution of Higher Education "National Research Perm Polytechnic University", Perm, Russia
- Keywords
- models of the structural zone / polycrystalline films / the evolution of structure / temperature and deposition process conditions / method of evaporation
- Year
- 2015 Issue 4 Pages 6 - 14
- Code EDN
- Code DOI
- Abstract
- This paper analyzes of the models of the structural zone (MSZ) of films, formed by electron beam, thermal, anodic and cathodic evaporation. Evolution of the film structure in MSZs studied depending on the temperature, technological and physical parameters of the deposition process: the substrate temperature, migration of grain boundaries, the level of contamination of the film, the impurity concentration, which depends on the intensities ratio of the input streams of impurity and metal the pressure of the gas a mixture of argon and nitrogen. In the low temperature range 0.15 < Tsub / Tm < 0.23 (the ratio of the substrate temperature (Tsub) to the melting temperature of the deposited film material (Tm) in Kelvin) evolution of the structure of the ternary thin polycrystalline Ti1-хAlxN and TixZr1-хN films with Tm ~ 4000 K was studied. The formation stages of the Ti1-хAlxN and TixZr1-хN films during cathodic arc evaporation were defined and MSZ films depending on Tsub / Tm and the rate of heating of the film during its deposition Vheat was developed. It is shown that the optimum value of the Vheat = 6 K / min an increase in the mobility of the adatoms, reduction of crystallites disorientation, their preferred orientation and the formation of solid nanostructured films with a homogeneous structure towards the formation. Use of nanostructured films with defined structure and composition allows to make surfaced of cutting toll and friction couple which have new physical-mechanic, antifriction, adhesive and corrosive properties, and also abrasion, crack and heat resistance that is not peculiar to base material.
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