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- Article name
- Corundum ceramics for the substructions of integrated microcircuits
- Authors
- ANUFRIEVA E. V., , elena-anufrieva@rambler.ru, Dmitry Mendeleev University of Chemical Technology of Russia, Moscow, Russia
LUKIN E. S., , lukin.1938@mail.ru, Russian Chemical-Technological University named after D. I. Mendeleyev, Moscow, Russia
POPOVA N. A., , nik-bakuga@mail.ru, Russian Chemical-Technological University named after D. I. Mendeleyev, Moscow, Russia
SANNIKOVA S. N., , cveta-sergy@mail.ru, OJSC "Composite", Korolev, Moscow region, Russia
- Keywords
- aluminum oxide / substrates / nanopowders / sintering / microstructure / shrinkage / strength / activation energy / surface roughness / crystal size / nonporous ceramics
- Year
- 2018 Issue 3 Pages 45 - 53
- Code EDN
- Code DOI
- Abstract
- Some features of technology and properties of ceramics from aluminum oxide used for manufacturing of substrates of integrated microcircuits are considered. The questions of sintering and the properties of ceramics from German alumina brand CT 3000 SG are discussed in detail. The parameters of the technological process ensuring the production of non-porous fine-crystalline products with high surface purity after machining are established. Information is provided on the production of nonporous fine crystalline products (substrates for microcircuits) using domestic raw materials and nanodispersed powders of additives in the Al2O3-ZrO2-Y2O3 system.
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