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- Article name
- Accumulation of sputtering products of a ferroelectric target in the high-frequency glow discharge plasma
- Authors
- Zinchenko S. P., , tres-3@mail.ru, Southern Scientific Center, Russian Academy of Sciences, 41 Chekhov av., Rostov-on-Don, 344006, Russia
Tolmachev G. N., , tres-3@mail.ru, Southern Scientific Center, Russian Academy of Sciences, 41 Chekhov av., Rostov-on-Don, 344006, Russia
- Keywords
- gas discharge / plasma / laser radiation / light scattering
- Year
- 2012 Issue 5 Pages 53 - 56
- Code EDN
- Code DOI
- Abstract
- It is possible to detect the microparticle accumulation area between the cathode dark space and negative glow by scattering of copper vapor laser radiation in the high-frequency glow discharge plasma. It is supposed that these particles are the charged products of the ferroelectric target to be sputtered.
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