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- Article name
- Optical properties of the Ta2O5 films in short-wave spectrum
- Authors
- Volpyan O. D., , o.d.volpian@rambler.ru, Research and Development Institute "Polyus", Moscow, Russia
Obod Yu. A., , , Fotron-Auto, LTD, Moscow, Russia
Yakovlev P. P., , , Research Institute "Polyus", 3 Vvedensky str., Moscow, 117342, Russia
- Keywords
- magnetron sputtering / optical properties / Ta2O5 films / Drude-Lorentz model
- Year
- 2012 Issue 4 Pages 47 - 53
- Code EDN
- Code DOI
- Abstract
- Optical parameters of the Ta2O5 films are determined by Drude-Lorentz model on the results of transmission coefficient measurements.
- Text
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