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- Article name
- Automated diagnostic of magnetron discharge plasma by atomic and molecular emission spectra
- Authors
- Troinov V. I., , , Bauman Moscow State Technical University, 5 Second Bauman str., Moscow, 105005, Russia
Gradov V. M., , , Bauman Moscow State Technical University, 5, 2-nd Bauman str., Moscow, 105005, Russia
Zimin A. M., , zimin@power.bmstu.ru, Bauman Moscow State Technical University, 5, 2-nd Bauman str., Moscow, 105005, Russia
Krivitsky S. E., , , Bauman Moscow State Technical University, 5, 2-nd Bauman str., Moscow, 105005, Russia
Serushkin S. V., , , Bauman Moscow State Technical University, 5, 2-nd Bauman str., Moscow, 105005, Russia
- Keywords
- spectral diagnostics of plasma / measuring and computing complex / magnetron discharge / atomic and molecular spectra
- Year
- 2012 Issue 3 Pages 44 - 49
- Code EDN
- Code DOI
- Abstract
- The hardware and software complex for research of spatial distributions of the plasma spectral emissivity are described. It allows us to record and detect lines and molecular bands in automatic mode, as well as perform computer processing of spectra. The molecular bands of deuterium for different electronic-vibrational-rotational transitions are identified. There are presented the estimates of the excitation temperature of atomic levels, translational, rotational and vibrational temperatures in planar magnetron discharge.
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