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- Article name
- Tribological, physico-mechanical and corrosion properties of ZrN-based films depending on technological and temperature parameters of process of their formation by magnetron sputtering
- Authors
- KAMENEVA A. L., , kameneva@pstu.ru, Federal State budget institution of higher education "National Research Perm Polytechnic University", Perm, Russia
- Keywords
- ZrN-based films / magnetron sputtering / tecnological and temperature parameters of forming / structural and phase changes / electron microscopic examination / X-ray diffraction phase analysis / mechanical / tribological and corrosion tests of films / the optimum range of technological parameters / a unique set of properties
- Year
- 2012 Issue 1 Pages 51 - 56
- Code EDN
- Code DOI
- Abstract
- The regularities of changes in the structure, phase composition, physico-mechanical, tribological and corrosion properties, wear ability and stress-making in the ZrN-based films during magnetron sputtering under the influence of technological and temperature parameters of their formation have been investigated. Nanocrustalline films with a unique complex of properties have been received.
- Text
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