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- Article name
- Ion-beam polishing study of the surfaces of optical device components
- Authors
- Andrianova N. N., , andrianova_nn@mail.ru, Institute of Nuclear Physics, Moscow State University, 1/2 Leninsky gory, Moscow, 119991, Russia
Borisov A. M., , , Institute of Nuclear Physics, Moscow State University, 1/2 Leninsky gory, Moscow, 119991, Russia
Borovskaya V. V., , , Institute of Nuclear Physics, Moscow State University, 1/2 Leninsky gory, Moscow, 119991, Russia
Mashkova E. S., , , Institute of Nuclear Physics, Moscow State University, 1/2 Leninsky gory, Moscow, 119991, Russia
- Keywords
- optical glass-ceramics / sputtering / ion polishing / surface relief
- Year
- 2012 Issue 2 Pages 36 - 39
- Code EDN
- Code DOI
- Abstract
- The results of experimental study of the ion-beam treatment process with the view of polishing the optical glass-ceramics surfaces have been presented. Ion irradiation has been produced by 10-30 keV Ar+ ions. Developed surface topography has been studied using FemtoScan. It is shown that the azimutal rotation of the irradiated sample suppresses the wave structure (ripples) and gives the effect of polishing - surface roughness is decreased from initial level Ra ~ 1 nm till 0.5 nm.
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