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- Article name
- Dynamic focusing by the quadrupole lens system for control of the submicron ion probe at electrostatic scanning
- Authors
- Melnik K. I., , ipfmail@ ipfcentr.sumy.ua, Institute of Applied Physics, NAN, Ukraine, 58 Petropavlovskaya str., Sumy, 40030, Ukraine
- Keywords
- probe forming system / electrostatic scanning system / quadrupole lens / dynamic focusing
- Year
- 2012 Issue 2 Pages 73 - 78
- Code EDN
- Code DOI
- Abstract
- Investigated is dynamic focusing by the quadrupole lens system for control of the submicron ion probe at electrostatic scanning.
- Text
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