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- Article name
- Longitudinal ion source with a current self-compensation of the focused ion beam
- Authors
- Bizyukov A. A., , sekons@mail.ru, V. N. Karazin Kharkiv National University, 4 Svobody sq., Kharkiv, 61077, Ukraine
Girka A. I., , sekons@mail.ru, V. N. Karazin Kharkiv National University, 4 Svobody sq., Kharkiv, 61077, Ukraine
Sereda K. N., , sekons@mail.ru, V. N. Karazin Kharkiv National University, 4 Svobody sq., Kharkiv, 61077, Ukraine
Sleptsov V. V., , 08fraktal@inbox.ru, Moscow State Aviation Technological University (MATI), 14/2 Bernikovskaya embankment, Moscow, 121552, Russia
Romashchenko E. V., , romaschenko@bk.ru, Volodymyr Dahl East Ukrainian National University, 20-а Molodizhny bl., Luhansk, 91034, Ukraine
- Keywords
- ion source / focused ion beam / beam current neutralization / dielectric target potential
- Year
- 2011 Issue 5 Pages 74 - 79
- Code EDN
- Code DOI
- Abstract
- In this work we introduce the ballistic focusing for the longitudinal Hall-type ion source. The focusing transforms the ion beam shape from 'ellipsoidal' one to linear one and increases the ion beam current density per the operating surface. The transversal magnetic field and edge effects are investigated as a factor influencing the beam shape. Charge neutralization of the ion beam is performed by plasma neutralizer, which uses supplementary semi-self-maintained magnetron-type discharge and hollow cathode effect.
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