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- Article name
- Modification of metal substrate surface layer at gas discharge sputtering of zirconium-titanium-lead films
- Authors
- NOVIKOVSKIY N. M., , novnim@ip.rsu.ru, South Federal University; Research Institute of Physics, Rostov-on-Don, Russia
PONOMARENKO V. O., , berserk2007@yandex.ru, Southern federal University, Rostov-on-Don, Russia
RAZNOMAZOV V. M., , raznomazov_vm@mail.ru, Research Institute of Physics Southern federal University, Rostov-on-Don, Russia
SARYCHEV D. A., , raznomazov_vm@mai.ru, Research Institute of Physics Southern federal University, Rostov-on-Don, Russia
ZINCHENKO S. P., , kovtun.ap@mail.ru, Southern Scientific Center of RAS, Rostov-on-Don, Russia
KOVTUN A. P., , kovtun.ap@mail.ru, Southern Scientific Center of RAS, Rostov-on-Don, Russia
TOLMACHOV G. N., , tolm@ip.rsu.ru, Southern Scientific Center of RAS, Rostov-on-Don, Russia
- Keywords
- thin films / x-ray spectral analysis / surface texture / surface modification / gas discharge
- Year
- 2011 Issue 3 Pages 54 - 58
- Code EDN
- Code DOI
- Abstract
- By using x-ray fluorescence analysis with slid angle of incidence was found that incidence surface (mosaic) texture of metal substrate was disappeared at the start stage of gas discharging influence of PZT-films. At the same time surface heterogeneity of growing at gas discharge camera PZT-film: at the flat part (mirror part for x-rays) titan is plated, and zirconium and lead are plated at another places. With time of sputtering film growing up on the metal substrate elemental composition of thin PZT-films is changed and approached to elemental composition of PZT-target.
- Text
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