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- Article name
- The changing of structuring process, phase composition and stress-strain properties of ion-plasmous film TiN under the influence of arc current
- Authors
- KAMENEVA A. L., , kameneva@pstu.ru, Federal State budget institution of higher education "National Research Perm Polytechnic University", Perm, Russia
- Keywords
- structuring process / phase composition / stress-strain properties / ion-plasmous film TiN / arc current
- Year
- 2011 Issue 2 Pages 60 - 70
- Code EDN
- Code DOI
- Abstract
- It was discovered that the increasing of the arc current of 80 to 100 A boosts meanings of the maximum film temperature and it heating rate shifts in the area of lager meaning: 755 K and 15.2 K/min accordingly. It was shown that during increasing of technological and temperature conditions, film forming rate, volume fraction of hexagonal phase TiN0,3 and decreasing of volume fraction of the primary cubic phase (111)TiN successive progress of all forming stages of the film with primary cubic phase (111)TiN don't changes. The increasing of size of the film formation comes to ambiguous changing of ratio of the preferred orientation of grains and film structural characteristics effects on film stress. Temperature conditions of the transconformation from globular, granular to well-ordered columnar film substructure have been installed.
- Text
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