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- Article name
- Structural and phase changes in the films according to position of substrate within the flow of plasmagenerative particles
- Authors
- KAMENEVA A. L., , kameneva@pstu.ru, Federal State budget institution of higher education "National Research Perm Polytechnic University", Perm, Russia
- Keywords
- structuring process / phase composition / stress-strain properties / ion-plasmous films TiN / arc current evaporation / cathode-substrate position
- Year
- 2011 Issue 1 Pages 51 - 62
- Code EDN
- Code DOI
- Abstract
- It was shown that increasing of a cathode to substrate distance does not change phase composition and direction of preferred crystal-lattice orientation of polycrystalline constituent of the film. Dependence of forming stages and structure condition of formed films on orientation of substrate in flow of film-forming particles and on temperature conditions of forming was discovered. It was shown that, besides of the dependence on orientation of the substrate in flow of the particles, a strict order of forming stages is necessary for process of structurization of the polyctystalline film, and such stages depend not only on film temperatures during the forming process but also on it heating rate. Discovered dependence of characteristics of the electrocoating process, temperature and structure characteristics of the film will enable to control the film structurization process, to minimize or exclude defects of the film, to control the structure, and as a result to control film properties and produce the film with needed quality.
- Text
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