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- Article name
- Application of influence of ion beams on structures film-substrate in technology of semiconductor devices and integrated schemes
- Authors
- Shautsukov A. G., , , Kabardino-Balkarian State University, 173 Chernyshevsky str., Nalchik, 360004, Russian
- Keywords
- ion beam / technology / semiconductor electronics
- Year
- 2010 Issue 6 Pages 104 - 108
- Code EDN
- Code DOI
- Abstract
- Work is devoted to application of influence of ionic bunches on structures film-substrate for improvement of technologies of formation of active structures of crystals of powerful high-voltage transistors, impact avalanche and transit time diodes, systems of metallization of some products of semiconductor electronics.
- Text
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