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- Article name
- 320×240 uncooled microbolometer IR FPA and sensor on basis of the sol-gel VOх
- Authors
- Dem'yanenko M. A., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Fomin B. I., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Vasil'ieva L. L., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Volkov C. A., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Marchishin I. V., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Esaev D. G., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Ovsyuk V. N., , dem_yanenko@thermo.isp.nsc.ru, Institute of Semiconductor Physics, Russian Academy of Sciences, 13 Ac. Lavrent'ev av., Novosibirsk, 630090, Russia
Dshhunjan V. L., , irmatrix@angstrem.ru, JSC Angstrem, 4/3 Road No. 4806, Zelenograd, Moscow, 124460, Russia
Volodin E. B., , irmatrix@angstrem.ru, JSC Angstrem, 4/3 Road No. 4806, Zelenograd, Moscow, 124460, Russia
Ermolov A. V., , irmatrix@angstrem.ru, JSC Angstrem, 4/3 Road No. 4806, Zelenograd, Moscow, 124460, Russia
Usov P. P., , irmatrix@angstrem.ru, JSC Angstrem, 4/3 Road No. 4806, Zelenograd, Moscow, 124460, Russia
Chesnokov V. P., , irmatrix@angstrem.ru, JSC Angstrem, 4/3 Road No. 4806, Zelenograd, Moscow, 124460, Russia
Chetverov Y. S., , ysc150@yandex.ru, JSC Central Research Institute Cyclone, 77 Scshelkovo highway, Moscow, 107497, Russia
Kudriavtsev P. N., , ysc150@yandex.ru, JSC Central Research Institute Cyclone, 77 Scshelkovo highway, Moscow, 107497, Russia
Zdobnikov A. E., , ysc150@yandex.ru, JSC Central Research Institute Cyclone, 77 Scshelkovo highway, Moscow, 107497, Russia
Ignatov А. А., , ysc150@yandex.ru, JSC Central Research Institute Cyclone, 77 Scshelkovo highway, Moscow, 107497, Russia
- Keywords
- microbolometers / vanadium oxide / sol-gel / multiplexer / uncooled / IR receiver
- Year
- 2010 Issue 4 Pages 124 - 130
- Code EDN
- Code DOI
- Abstract
- The technology of fabrication of 320×240 uncooled microbolometer sensor assembly operated in the 8-14 micron spectral region is developed. The sensor assembly includes bridge type microbolometer focal plane array, thermoelectric stabilizer of temperature, small-size vacuum package, antireflection coated germanium window and getter. Noise equivalent temperature difference better than 100 mK has been demonstrated at 50 Hz frame rate and 60º field of view.
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