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- Article name
- Device of the exact positioning for electronic microscopes
- Authors
- Vasin V. A., , vacuumwa@list.ru; vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics, 3, B. Trekhsvyatitel'skiy trudged., Moscow, 109028, Russia
- Keywords
- the device of exact positioning / tubular elastic-deformed drive gears / pollution by an electromagnetic background / deterioration microparticles
- Year
- 2010 Issue 4 Pages 137 - 138
- Code EDN
- Code DOI
- Abstract
- The device of exact positioning for electronic microscopes not creating electromagnetic hindrances which can be used in a number of the biological and some other probes demanding a total absence of given hindrances is resulted. Thus the device provides comprehensible accuracy of positioning, comparable with piezoelectric.
- Text
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